Sun Taek Lim
1Patents
1h-index
5Co-inventors
25Inventor score
Filing activity: May 7, 2018 → May 7, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10790168B2 | Plasma treatment apparatus and method of fabricating semiconductor device using the same | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.