Susan Telford
5Patents
5h-index
9Co-inventors
48Inventor score
Filing activity: Mar 11, 1993 → Aug 26, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5326725A | Clamping ring and susceptor therefor | Electricity | 100 | Expired |
| US5565382A | Process for forming tungsten silicide on semiconductor wafer using dichlorosilane gas | Chemistry; Metallurgy | 24 | Expired |
| US5482749A | Pretreatment process for treating aluminum-bearing surfaces of deposition chamber prior to deposition of tungsten silicide coating on substrate therein | Chemistry; Metallurgy | 20 | Expired |
| US5510297A | Process for uniform deposition of tungsten silicide on semiconductor wafers by treatment of susceptor having aluminum nitride surface thereon with tungsten silicide after cleaning of susceptor | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6090706A | Preconditioning process for treating deposition chamber prior to deposition of tungsten silicide coating on active substrates therein | Emerging Cross-Sectional Technologies | 13 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.