Inventor · Daejeon, KR

TAEIL CHO

1Patents
0h-index
8Co-inventors
19Inventor score

Filing activity: Jun 29, 2020 → Jun 29, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US11348760B2 Plasma processing apparatus and method of manufacturing semiconductor device using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.