Takakazu Seki
3Patents
3h-index
9Co-inventors
39Inventor score
Filing activity: Jun 8, 1990 → Feb 22, 1995
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5135629A | Thin film deposition system | Electricity | 66 | Expired |
| US5466355A | Mosaic target | Chemistry; Metallurgy | 25 | Expired |
| US5415829A | Sputtering target | Performing Operations; Transporting | 20 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.