Tero Pilvi
1Patents
1h-index
3Co-inventors
25Inventor score
Filing activity: Nov 25, 2015 → Nov 25, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10619241B2 | ALD method and apparatus | Chemistry; Metallurgy | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.