Thomas Aswad
5Patents
3h-index
2Co-inventors
47Inventor score
Filing activity: Jul 6, 1998 → Sep 19, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6578287B2 | Substrate cooling system and method | Emerging Cross-Sectional Technologies | 63 | Expired |
| US6073366A | Substrate cooling system and method | Emerging Cross-Sectional Technologies | 59 | Expired |
| US6408537B1 | Substrate cooling system | Emerging Cross-Sectional Technologies | 9 | Expired |
| US11473195B2 | Semiconductor processing apparatus and a method for processing a substrate | Chemistry; Metallurgy | 1 | Active |
| US12018365B2 | Semiconductor processing apparatus and a method for processing a substrate | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.