Thomas Beeg
3Patents
1h-index
3Co-inventors
30Inventor score
Filing activity: Jun 27, 2016 → Jan 15, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9911634B2 | Self-contained metrology wafer carrier systems | Electricity | 1 | Active |
| US10818528B2 | Self-contained metrology wafer carrier systems | Electricity | 0 | Active |
| US10242895B2 | Self-contained metrology wafer carrier systems | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.