Self-contained metrology wafer carrier systems
US10818528B2 · kind B2 · utility
0Cited by
17References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2019 |
| Grant date | Oct 27, 2020 |
| Priority date | — |
| Expiry date | Jan 15, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67745
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Self-contained metrology wafer carrier systems and methods of measuring one or more characteristics of semiconductor wafers. The wafer carrier system may include a housing configured for transport within the automated material handling system. A support is configured to support a semiconductor wafer within a housing. A metrology system is disposed within the housing. The metrology system is operable to measure at least one characteristic of the wafer. The metrology system may include a sensing unit and a computing unit operably connected to the sensing unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.