Thomas Stotts
1Patents
1h-index
3Co-inventors
25Inventor score
Filing activity: Mar 31, 2006 → Mar 31, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7115017B1 | Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization | Performing Operations; Transporting | 269 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.