Tien-Ya Chen
3Patents
1h-index
2Co-inventors
27Inventor score
Filing activity: Dec 16, 1997 → May 3, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6289550A | Jet cleaning device for developing station | Performing Operations; Transporting | 3 | Expired |
| US6097992A | Method and controlling system for preventing the scratching of wafer backs by the fetch arm of a stepper machine | Electricity | 0 | Expired |
| US6286178A | Jet cleaning device for developing station | Performing Operations; Transporting | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.