Inventor · Langenau, DE

Tobias Hackl

2Patents
1h-index
11Co-inventors
34Inventor score

Filing activity: Dec 13, 2012 → Dec 28, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US8546776B2 Optical system for EUV lithography with a charged-particle source Physics 1 Active
US9921483B2 Surface correction of mirrors with decoupling coating Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.