Tooru KITADA
2Patents
1h-index
7Co-inventors
27Inventor score
Filing activity: Sep 18, 2014 → Jul 27, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9551060B2 | Film forming apparatus and film forming method | Electricity | 2 | Active |
| US9567667B2 | Dual-target sputter deposition with controlled phase difference between target powers | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.