Tooru Ueno
5Patents
2h-index
9Co-inventors
36Inventor score
Filing activity: Sep 20, 2000 → Aug 29, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6795745B1 | Methods of operating vacuum processing equipment and methods of processing wafers | Electricity | 9 | Expired |
| US6920369B2 | Methods of operating vacuum processing equipment and methods of processing wafers | Electricity | 7 | Expired |
| US7476073B2 | Vacuum processing method | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7862289B2 | Vacuum processing apparatus and vacuum processing method | Emerging Cross-Sectional Technologies | 0 | Active |
| US8033770B2 | Vacuum processing apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.