Vacuum processing method
US7476073B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 24, 2004 |
| Grant date | Jan 13, 2009 |
| Priority date | — |
| Expiry date | Oct 8, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vacuum processing apparatus and method includes at least one vacuum processing chamber, at least one carriage for carrying the sample from a given cassette into and out of the vacuum processing chamber. A controller performs carriage control for carrying the sample taken out of the given cassette into the vacuum processing chamber, and for carrying the processed sample out of the vacuum processing chamber. A waiting cassette support supports a waiting cassette in which an unprocessed sample from the given cassette or a processed sample from the given cassette after vacuum processing is placed so as to prevent the processed and unprocessed sample from being mixed with each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.