Usama Dadu
5Patents
2h-index
16Co-inventors
40Inventor score
Filing activity: Jun 3, 2015 → Feb 25, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9911579B2 | Showerhead having a detachable high resistivity gas distribution plate | Electricity | 6 | Active |
| US10607816B2 | Showerhead having a detachable high resistivity gas distribution plate | Electricity | 3 | Active |
| US10790120B2 | Showerhead having a detachable high resistivity gas distribution plate | Electricity | 1 | Active |
| US10546731B1 | Method, apparatus and system for wafer dechucking using dynamic voltage sweeping | Electricity | 1 | Active |
| US10410845B2 | Using bias RF pulsing to effectively clean electrostatic chuck (ESC) | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.