Vinaya Kavathekar
10Patents
5h-index
2Co-inventors
42Inventor score
Filing activity: Oct 23, 2007 → Oct 23, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7945348B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 21 | Active |
| US7769482B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 15 | Active |
| US8639489B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 5 | Active |
| US7899562B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 5 | Active |
| US8639365B2 | Methods and systems for controlling a semiconductor fabrication process | Physics | 5 | Active |
| US8972029B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 3 | Active |
| US8775148B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 3 | Active |
| US8473270B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 3 | Active |
| US10444749B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 2 | Active |
| US8612198B2 | Methods and systems for controlling a semiconductor fabrication process | Emerging Cross-Sectional Technologies | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.