Methods and systems for controlling a semiconductor fabrication process

US8639489B2 · kind B2 · utility

Assignee

• Brooks Automation GmbH · US

Inventors

• Patrick D. Pannese · Lynnfield, US
• Vinaya Kavathekar · Cupertino, US
• Peter van der Meulen · Newburyport, US

Key dates

• Filing date: Oct 23, 2007
• Grant date: Jan 28, 2014
• Expiry date: Apr 17, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/80
• WIPO field: Control
• WIPO sector: Instruments

Abstract

Software for controlling processes in a heterogeneous semiconductor manufacturing environment may include a wafer-centric database, a real-time scheduler using a neural network, and a graphical user interface displaying simulated operation of the system. These features may be employed alone or in combination to offer improved usability and computational efficiency for real time control and monitoring of a semiconductor manufacturing process. More generally, these techniques may be usefully employed in a variety of real time control systems, particularly systems requiring complex scheduling decisions or heterogeneous systems constructed of hardware from numerous independent vendors.