Inventor · Osan-si, KR

Won Sik Ahn

1Patents
0h-index
7Co-inventors
19Inventor score

Filing activity: Dec 14, 2021 → Dec 14, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US12371783B2 Internal chamber processing method and substrate processing method Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.