Yangchung Lee
2Patents
0h-index
7Co-inventors
24Inventor score
Filing activity: Jul 16, 2018 → May 17, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11702738B2 | Chamber processes for reducing backside particles | Electricity | 0 | Active |
| US10497567B2 | Method of enhanced selectivity of hard mask using plasma treatments | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.