Inventor · Fukushima, JP

Yasuharu Ariga

3Patents
2h-index
6Co-inventors
37Inventor score

Filing activity: Sep 11, 2000 → May 12, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US6652356B1 Wire saw and cutting method Performing Operations; Transporting 21 Expired
US7740521B2 Polishing head, polishing apparatus and polishing method for semiconductor wafer Performing Operations; Transporting 5 Expired
US10293460B2 Method of producing polishing head and polishing apparatus Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.