Yasuhiro Kaga
5Patents
4h-index
7Co-inventors
46Inventor score
Filing activity: Feb 7, 1991 → Aug 16, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5161201A | Method of and apparatus for measuring pattern profile | Physics | 30 | Expired |
| US5576542A | Substrate cross-section observing apparatus | Electricity | 18 | Expired |
| US5159643A | Method and apparatus for measuring pattern dimension | Physics | 14 | Expired |
| US5302829A | Automatic focusing method for scanning electron microscopy | Electricity | 9 | Expired |
| US7512501B2 | Defect inspecting apparatus for semiconductor wafer | Physics | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.