Patent · US Active

Defect inspecting apparatus for semiconductor wafer

US7512501B2 · kind B2 · utility

3Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 16, 2007
Grant dateMar 31, 2009
Priority date—
Expiry dateAug 16, 2027

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/8851
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A defect inspecting apparatus comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.