Yoji Bito
3Patents
2h-index
8Co-inventors
33Inventor score
Filing activity: Jan 24, 1997 → Feb 18, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5840200A | Method of manufacturing semiconductor devices | Electricity | 43 | Expired |
| US5989929A | Apparatus and method for manufacturing semiconductor device | Electricity | 14 | Expired |
| US7244625B2 | Plasma processing method and plasma processing device | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.