Yoko Noto
2Patents
2h-index
6Co-inventors
30Inventor score
Filing activity: Mar 3, 2011 → Aug 11, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9087798B2 | Etching method | Electricity | 38 | Active |
| US9324572B2 | Plasma etching method, method for producing semiconductor device, and plasma etching device | Electricity | 6 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.