Yonatan Vaknin
7Patents
1h-index
17Co-inventors
37Inventor score
Filing activity: Mar 31, 2021 → Jun 20, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11800212B1 | Multi-directional overlay metrology using multiple illumination parameters and isolated imaging | Physics | 2 | Active |
| US12066322B2 | Single grab overlay measurement of tall targets | Physics | 1 | Active |
| US11592755B2 | Enhancing performance of overlay metrology | Electricity | 1 | Active |
| US12001148B2 | Enhancing performance of overlay metrology | Electricity | 1 | Active |
| US12422363B2 | Scanning scatterometry overlay metrology | Physics | 0 | Active |
| US12032300B2 | Imaging overlay with mutually coherent oblique illumination | Physics | 0 | Active |
| US12399435B2 | Grating-over-grating overlay measurement with parallel color per layer | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.