Inventor · Suwon-si, KR

Yong-Jun Ahn

7Patents
1h-index
32Co-inventors
43Inventor score

Filing activity: Jan 22, 2015 → Aug 21, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9543178B2 Semiconductor wafer stocker apparatus and wafer transferring methods using the same Electricity 11 Active
US10964570B2 Semiconductor wafer storage system and method of supplying fluid for semiconductor wafer storage Electricity 1 Active
US12387759B2 Cassette storage case and cassette management system including the same Physics 0 Active
US11733077B2 Carrier for measurement and wafer transfer system including the same Electricity 0 Active
US12068185B2 Interlayer transfer apparatus and article transfer system including the same Performing Operations; Transporting 0 Active
US12283502B2 Substrate transfer device and substrate transfer method Electricity 0 Active
US12365095B2 Loader device and substrate transport system Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.