Semiconductor wafer storage system and method of supplying fluid for semiconductor wafer storage
US10964570B2 · kind B2 · utility
1Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 1, 2019 |
| Grant date | Mar 30, 2021 |
| Priority date | — |
| Expiry date | Aug 1, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.