Youjin Wang
7Patents
2h-index
7Co-inventors
36Inventor score
Filing activity: Jan 9, 2013 → Sep 14, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9164399B2 | Reticle operation system | Physics | 2 | Active |
| US10088438B2 | Method and system for inspecting an EUV mask | Electricity | 2 | Active |
| US10775325B2 | Method and system for inspecting an EUV mask | Electricity | 1 | Active |
| US9859089B2 | Method and system for inspecting and grounding an EUV mask | Electricity | 1 | Active |
| US9485846B2 | Method and system for inspecting an EUV mask | Electricity | 0 | Active |
| US11662323B2 | Method and system for inspecting an EUV mask | Electricity | 0 | Active |
| US10643818B2 | Load lock system for charged particle beam imaging | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.