Yuji Ohkuma
4Patents
3h-index
1Co-inventors
40Inventor score
Filing activity: Jun 27, 1984 → Sep 29, 1994
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4557785A | Apparatus for wet processing | Emerging Cross-Sectional Technologies | 60 | Expired |
| US4637146A | Spin dryer | Physics | 16 | Expired |
| US5429642A | Method for transferring wafers from one processing station to another sequentially and system therefor | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5380684A | Method for transferring wafers from one processing station to another sequentially and system therefor | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.