Spin dryer
US4637146A · kind A · utility
16Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 14, 1984 |
| Grant date | Jan 20, 1987 |
| Priority date | — |
| Expiry date | Aug 14, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/40
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A spin dryer including a rotary stage for supporting a substrate to be dried, particularly adapted for use in producing semiconductor devices, and a stationary cover spaced from the substrate. The stationary cover has at least the same area as that of the substrate and is provided with a number of openings for charging a dry and dust-free gas onto the substrate, whereby oxidation and dust-contamination of the substrate are avoided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.