Yuji Takanami
2Patents
0h-index
4Co-inventors
24Inventor score
Filing activity: Jul 14, 2020 → Jan 21, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11694882B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US11270873B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.