Yuri Vinshtein
6Patents
2h-index
7Co-inventors
36Inventor score
Filing activity: Sep 28, 2017 → Apr 27, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11181490B2 | Small-angle x-ray scatterometry | Electricity | 5 | Active |
| US10386313B2 | Closed-loop control of X-ray knife edge | Physics | 3 | Active |
| US10976268B2 | X-ray source optics for small-angle X-ray scatterometry | Physics | 1 | Active |
| US11703464B2 | Small-angle x-ray scatterometry | Electricity | 0 | Active |
| US10976269B2 | Wafer alignment for small-angle x-ray scatterometry | Physics | 0 | Active |
| US12085521B2 | Small-angle X-ray scatterometry | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.