Small-angle x-ray scatterometry
US11181490B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 4, 2019 |
| Grant date | Nov 23, 2021 |
| Priority date | — |
| Expiry date | Jul 4, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.