Inventor · Shanghai, CN

Zhenming Chu

2Patents
0h-index
7Co-inventors
24Inventor score

Filing activity: Sep 8, 2015 → Mar 30, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US11298727B2 Substrate cleaning apparatus Electricity 0 Active
US10770315B2 Fall-proof apparatus for cleaning semiconductor devices and a chamber with the apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.