Inventor · Beijing, CN

Zhonghui Wang

6Patents
1h-index
13Co-inventors
44Inventor score

Filing activity: Feb 11, 2002 → May 31, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6911136B2 Method for regulating the electrical power applied to a substrate during an immersion process Chemistry; Metallurgy 10 Expired
US7709400B2 Thermal methods for cleaning post-CMP wafers Electricity 1 Active
US7109111B2 Method of annealing metal layers Electricity 1 Expired
US11949087B2 Method for preparing graphene-coated powder material, and product of method Emerging Cross-Sectional Technologies 0 Active
US7884017B2 Thermal methods for cleaning post-CMP wafers Electricity 0 Active
US9335191B1 High-precision pressure sampling head of pitot tube flow sensor Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.