Method for regulating the electrical power applied to a substrate during an immersion process
US6911136B2 · kind B2 · utility
10Cited by
107References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 2002 |
| Grant date | Jun 28, 2005 |
| Priority date | — |
| Expiry date | Sep 16, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D21/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus for providing a uniform current density across an immersed surface of a substrate during an immersion process. The method includes the steps of determining a time varying area of an immersed portion of the substrate during the immersion process, and supplying a time varying current to the substrate during the immersion process, wherein the time varying current is proportional to the time varying area and is configured to provide a constant current density to the immersed portion of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.