Zonghui SU
3Patents
1h-index
9Co-inventors
30Inventor score
Filing activity: Jul 19, 2017 → Mar 13, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10276364B2 | Bevel etch profile control | Electricity | 3 | Active |
| US10629427B2 | Bevel etch profile control | Electricity | 1 | Active |
| US10599043B2 | Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.