Vertical multi-batch magnetic annealing systems for reduced footprint manufacturing environments
US10003018B1 · kind B1 · utility
2Cited by
4References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 2017 |
| Grant date | Jun 19, 2018 |
| Priority date | — |
| Expiry date | May 8, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P10/25
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Embodiments are described for annealing systems and related methods to process microelectronic workpieces using vertical multi-batch perpendicular magnetic annealing systems that allow for a side-by-side configuration of multiple annealing systems to satisfy reduced footprint requirements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.