Resonator electrode shields
US10003320B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2017 |
| Grant date | Jun 19, 2018 |
| Priority date | — |
| Expiry date | May 15, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02496
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.