Aaron Partridge
135Patents
22h-index
37Co-inventors
90Inventor score
Filing activity: May 27, 1999 → Apr 22, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6936491B2 | Method of fabricating microelectromechanical systems and devices having trench isolated contacts | Performing Operations; Transporting | 112 | Expired |
| US6995622B2 | Frequency and/or phase compensated microelectromechanical oscillator | Electricity | 98 | Expired |
| US6987432B2 | Temperature compensation for silicon MEMS resonator | Electricity | 77 | Expired |
| US6928879B2 | Episeal pressure sensor and method for making an episeal pressure sensor | Performing Operations; Transporting | 67 | Expired |
| US7202761B2 | Temperature compensation for silicon MEMS resonator | Electricity | 66 | Expired |
| US6930367B2 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Performing Operations; Transporting | 49 | Expired |
| US7449355B2 | Anti-stiction technique for electromechanical systems and electromechanical device employing same | Electricity | 45 | Expired |
| US6389899B1 | In-plane micromachined accelerometer and bridge circuit having same | Physics | 45 | Expired |
| US7227432B2 | MEMS resonator array structure and method of operating and using same | Electricity | 44 | Expired |
| US7102467B2 | Method for adjusting the frequency of a MEMS resonator | Electricity | 43 | Expired |
| US7075160B2 | Microelectromechanical systems and devices having thin film encapsulated mechanical structures | Electricity | 43 | Expired |
| US7068125B2 | Temperature controlled MEMS resonator and method for controlling resonator frequency | Electricity | 40 | Expired |
| US7446620B2 | Microelectromechanical oscillator having temperature measurement system, and method of operating same | Electricity | 35 | Active |
| US7071793B2 | Temperature compensation for silicon MEMS resonator | Electricity | 31 | Expired |
| US7456042B2 | Microelectromechanical systems having stored charge and methods for fabricating and using same | Electricity | 29 | Active |
| US7369004B2 | Microelectromechanical oscillator and method of operating same | Electricity | 29 | Active |
| US7446619B2 | Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same | Electricity | 27 | Active |
| US7323952B2 | Breath-mode ring resonator structure, and method of designing, operating and using same | Electricity | 26 | Expired |
| US6952041B2 | Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same | Performing Operations; Transporting | 25 | Expired |
| US7115436B2 | Integrated getter area for wafer level encapsulated microelectromechanical systems | Electricity | 24 | Expired |
| US7205867B2 | Microelectromechanical resonator structure, and method of designing, operating and using same | Electricity | 23 | Expired |
| US7808332B1 | Resonator electrode shields | Electricity | 22 | Active |
| US7172917B2 | Method of making a nanogap for variable capacitive elements, and device having a nanogap | Performing Operations; Transporting | 21 | Expired |
| US7074637B2 | Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems | Performing Operations; Transporting | 20 | Expired |
| US8324729B2 | Stacked die package for MEMS resonator system | Electricity | 17 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.