Apparatus for determining an optical property of an optical imaging system

US10006807B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Albrecht Ehrmann · Aalen, DE
• Markus Goeppert · Aalen, DE
• Helmut Haidner · Aalen, DE

Key dates

• Filing date: Mar 21, 2016
• Grant date: Jun 26, 2018
• Expiry date: Jan 24, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2001/444
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus (10) determining an optical property of an imaging system (12) includes an illumination system (20) directing electromagnetic radiation (18) onto an object plane (22) of the imaging system, a utilization detector (42) determining the optical property, an output coupling device (46), and an intensity sensor (50). The detector captures the radiation after it has traveled along a utilized beam path (45) extending to the utilization detector. The output coupling device couples sensor radiation (48) out of the utilized beam path and into a sensor beam path (49) that differs from the utilized beam path. The intensity sensor records an angularly resolved intensity distribution present at least at one point in the object plane of the optical imaging system, which intensity distribution reproduces the intensity of the electromagnetic radiation in dependence on the angle of incidence with respect to the object plane.