Silicon-containing underlayers

US10007184B2 · kind B2 · utility

Assignee

• Rohm and Haas Electronic Materials LLC · US

Inventors

• Li Cui · Westborough, US
• Charlotte Cutler · Hopkinton, US
• Suzanne M. Coley · Mansfield, US
• Owendi Ongayi · Marlborough, US
• Christopher P. Sullivan · Halifax, US
• Paul J. LaBeaume · Auburn, US
• Shintaro Yamada · Shrewsbury, US
• Mingqi Li · Sammamish, US
• James F. Cameron · Brookline, US

Key dates

• Filing date: Sep 1, 2016
• Grant date: Jun 26, 2018
• Expiry date: Sep 1, 2036

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08G77/80
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si—O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.