Patent · US Active

Complementary metal oxide semiconductor device and method of forming the same

US10008599B1 · kind B1 · utility

13Cited by
1References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 1, 2017
Grant dateJun 26, 2018
Priority date
Expiry dateMar 1, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/0167
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A complementary metal oxide semiconductor (CMOS) device is disclosed. The CMOS device includes a substrate with a first device region and a second device region formed thereon. A first isolation structure is formed in the first device region, and includes a first trench filled with a first material. A second isolation structure is formed in the second device region and includes a second trench filled with a second material. The first material and the second material have different stresses. A first gate structure is disposed atop the first material and completely covering the first trench. A second gate structure is disposed atop the second material and completely covering the second trench.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.