Device and method for aligning substrates
US10014202B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Jun 12, 2012 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Jun 16, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/21
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for aligning and bringing a large-area substrate into contact with a carrier substrate comprising: a substrate holding means for attaching the substrate; a carrier substrate holding means for attaching the carrier substrate; detection means for detection of a peripheral contour of the substrate attached to the substrate holding means and detection of a peripheral contour of the carrier substrate attached to the carrier substrate holding means relative to a contact plane of the substrate with the carrier substrate; aligning means for aligning the substrate relative to the carrier substrate; and contacting means for bringing the substrate into contact with the carrier substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.