Substrate conveyance robot and operating method thereof
US10014205B2 · kind B2 · utility
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1References
10Claims
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Key dates
| Filing date | Dec 14, 2015 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Jul 13, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate conveyance robot has an end effector provided to a robot arm and including a substrate holding unit configured to hold a substrate, arm drive unit configured to drive the robot arm, a robot control unit configured to control the arm drive unit, and a holding force detection unit configured to detect a substrate holding force exerted by the substrate holding unit. The robot control unit controls the arm drive unit based on an upper limit value of at least one of acceleration and speed of the end effector which are determined in accordance with the substrate holding force detected by the holding force detection unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.