Vacuum pump
US10024328B2 · kind B2 · utility
0Cited by
7References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2013 |
| Grant date | Jul 17, 2018 |
| Priority date | — |
| Expiry date | Aug 24, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B30/70
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The present invention relates to a vacuum pump comprising a turbo molecular pumping mechanism wherein an operative characteristic of the turbomolecular pumping mechanism is dependent on the orientation of the vacuum pump and the pump comprises an orientation sensor for sensing the orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.