Patent assignee · GB · COMPANY

Edwards Limited

269Patents
251Active
269Granted
59Portfolio score

Filing activity: Mar 27, 2003 → Dec 16, 2022 · 88 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8168128B2 Plasma reactor Performing Operations; Transporting 34 Active
US11326586B2 Exhaust coupling Mechanical Engineering; Lighting; Heating 31 Active
US8776719B2 Microwave plasma reactor Emerging Cross-Sectional Technologies 21 Active
US8518162B2 Method of treating a gas stream Emerging Cross-Sectional Technologies 15 Active
US8740588B2 Multiple inlet vacuum pumps Electricity 12 Active
US7442016B2 Scroll pump and method of assembling same Mechanical Engineering; Lighting; Heating 11 Expired
US7481867B2 Vacuum system for immersion photolithography Physics 11 Active
US8323006B2 Scroll pump with an electromagnetic drive mechanism Mechanical Engineering; Lighting; Heating 10 Active
US8105051B2 Vacuum pump Emerging Cross-Sectional Technologies 9 Active
US8308458B2 Rotor assembly for multi-stage pump Mechanical Engineering; Lighting; Heating 8 Active
US7850434B2 Pumping arrangement Electricity 8 Active
US7814922B2 Apparatus for controlling the pressure in a process chamber and method of operating same Emerging Cross-Sectional Technologies 8 Expired
US7866940B2 Vacuum pump Electricity 8 Active
US8186937B2 Vacuum pump Mechanical Engineering; Lighting; Heating 7 Active
US9333460B2 Plasma treatment device Electricity 7 Active
US8235678B2 Multi-stage vacuum pumping arrangement Electricity 6 Active
US7811065B2 Vacuum pump for differential pumping multiple chambers Electricity 6 Active
US8181944B2 Vibration damper Mechanical Engineering; Lighting; Heating 6 Active
US8456167B2 Ionisation vacuum gauges and gauge heads Electricity 6 Active
US8500422B2 Vacuum pump Mechanical Engineering; Lighting; Heating 6 Active
US8591210B2 Scroll compressor having adjustable spacers Emerging Cross-Sectional Technologies 5 Active
US8662841B2 Vacuum pump Mechanical Engineering; Lighting; Heating 5 Active
US8070459B2 Pressure control method Physics 5 Active
US8657942B2 Trap device Electricity 5 Active
US9080571B2 Pump enveloped with thermally conductive material Emerging Cross-Sectional Technologies 5 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.