Patent · US Active

Micromechanical component including a diffusion stop channel

US10029911B2 · kind B2 · utility

3Cited by

0References

4Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Achim Breitling · Echterdingen, DE
Frank Reichenbach · Wannweil, DE
Jochen Reinmuth · Reutlingen, DE
Julia Amthor · Reutlingen, DE

Key dates

Filing date	Jan 9, 2017
Grant date	Jul 24, 2018
Priority date	—
Expiry date	Jan 9, 2037

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/035
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for manufacturing a micromechanical component is provided including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the cap together with the substrate enclosing a second cavity, a second pressure prevailing and a second gas mixture having a second chemical composition being enclosed in the second cavity. A recess situated essentially between the first cavity and the second cavity is formed for diverting at least one first particle type of the first gas mixture and/or at least one second particle type of the second gas mixture.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.