Arrangement for correcting aberrations on a microscope
US10031333B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 22, 2016 |
| Grant date | Jul 24, 2018 |
| Priority date | — |
| Expiry date | Aug 23, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0025
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An arrangement for correcting aberrations of a specimen surface that vary across the visual field on a microscope, including a lens, a tubular lens, an imaging optics element, a pupil stop disposed in the beam path, and at least one optical element for optical-geometric separation of different image field regions. The optical element for optical-geometric separation of different image field regions is arranged in or near the intermediate image plane. Each individual element of the optical element for optical-geometric separation of different image field regions performs a pupil imaging, defined by the dimensions of the covered area of the intermediate image, such that a distribution of sub-pupils occurs, wherein each sub-pupil is allocated to the angle distribution from the associated image field region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.