Patent assignee · DE · COMPANY

Carl Zeiss Microscopy GmbH

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698Patents
695Active
698Granted
64Portfolio score

Filing activity: Nov 20, 2003 → Dec 17, 2024 · 62 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US9201011B2 Increased depth-resolution microscopy Physics 41 Active
US8499537B2 Arrangement for filling a container with bulk material Human Necessities 34 Active
US9536702B2 Multi-beam particle microscope and method for operating same Electricity 29 Active
US9263233B2 Charged particle multi-beam inspection system and method of operating the same Electricity 28 Active
US9336981B2 Charged particle detection system and multi-beamlet inspection system Electricity 27 Active
US10535494B2 Particle beam system and method for the particle-optical examination of an object Electricity 26 Active
US9349571B2 Particle optical system Electricity 25 Active
US10600613B2 Particle beam system Electricity 25 Active
US9336982B2 Method of detecting electrons, an electron-detector and an inspection system Electricity 25 Active
USD771169S1 Microscope General 24 Active
US9653254B2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Electricity 24 Active
US9991089B2 Particle beam system and method for operating a particle optical unit Electricity 23 Active
US10622184B2 Objective lens arrangement usable in particle-optical systems Electricity 22 Active
US9702983B2 Multi-spot collection optics Electricity 22 Active
US10388487B2 Method for operating a multi-beam particle microscope Electricity 22 Active
US10354831B2 Charged particle inspection method and charged particle system Electricity 22 Active
US8598525B2 Particle beam system Electricity 22 Active
US10541112B2 Charged particle beam system and method of operating the same Electricity 22 Active
US9530613B2 Focusing a charged particle system Electricity 22 Active
USD784433S1 Microscope General 19 Active
US8705172B2 Microscopy method and microscope with enhanced resolution Physics 18 Active
US9645378B2 Microscope and method for SPIM microscopy Physics 15 Active
US8704196B2 Combination microscopy Physics 14 Active
USD777118S1 Combined touchpad, operating knobs and display module for electrical control device General 14 Active
US8637834B2 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements Electricity 13 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.